รายละเอียดเพิ่มเติม
TTS series
■ Unique telescopic mechanism to cover high and low positions.
■ Compliant with SEMI-F47 and S-2 standards.
The TTS series robot can access 2 and 3 FOUPs of EFEM without a track. The specially designed drive system enables the robot to move incredibly smoothly and with high precision. In addition, its rigid telescopic mechanism delivers high-speed handling in high and low positions.
The series is compliant with the SEMI-F47 standard as well as the SEMI-S2 standard.
Applications
