NTS20

NTS20

  • Payload
  • Max. Reach  1066mm
  • Applications  Silicon Wafer Handling
  • Robot Category  Wafer Transfer Robots
  • Mounting  Floor
  • Series  NTS series

Categories: , Product ID: 2779

Description

NTS series

■ Accessible to 2 and 3 FOUP FEM
■ Unique driving mechanism yields smooth and accurate movements
■ Compliant with SEMI-F47 and S2 standards

 

The NTS series robot can access 2 and 3 FOUPs of EFEM without a track. The specially designed drive system enables the robot to move incredibly smoothly and with high precision.

The series is compliant with the SEMI-F47 standard as well as the SEMI-S2 standard.

 

Applications  Silicon Wafer Handling

 

 

 

 

 

LOGTHAI-SOLUTECH CO., LTD.

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