รายละเอียดเพิ่มเติม
NTS series
■ Accessible to 2 and 3 FOUP FEM
■ Unique driving mechanism yields smooth and accurate movements
■ Compliant with SEMI-F47 and S2 standards
The NTS series robot can access 2 and 3 FOUPs of EFEM without a track. The specially designed drive system enables the robot to move incredibly smoothly and with high precision.
The series is compliant with the SEMI-F47 standard as well as the SEMI-S2 standard.
Applications
